| 摘要 |
PURPOSE:To make it the most proper to form a thin magnetic film of high magnetic resistance by vacuum-evaporating a non-magnetic layer and a ferromagnetic layer upon a flexible substrate at the peripheral sides of rotary cans having different curvatures. CONSTITUTION:The space 2 in a vacuum container 1 is held under a vacuum by a scavenging system 3. A flexible base material 4 such as a high molecular film is symultaneously moved along a roller 12, a cylindrical rotary can 7 which is heated or cooled, and another cylindrical rotary can 8 having a curvature 1.3 to 4.0 times of the former can 7 so that it is let off or taken up by one of shafts 9 and 10 in accordance with the moving directions shown at arrows a and b. A non-magnetic material 5 and a ferromagnetic material 6 in water-cooled copper harnesses 15 and 16 are heated and evaporated by electron guns 13 and 14 so that the respective vapor flows are directed to the base material 4 between partitions 11, thus forming the non-magnetic layer and the ferromagnetic layer. |
