发明名称 Vacuum chamber for coating strip - has air lock chambers to permit continuous coating
摘要 <p>Strip travels from an uncoiling spool through an air lock chamber, a vacuum chamber, and then back through the airlock chamber to a coiling spool. The chambers contain an endless conveyor belt feeding the strip without slip through the chambers. The strip is removed from the belt in the vacuum chamber for coating on the side in contact with the belt, the strip travelling in a loop above an evaporator for the coating material. The vacuum chamber pref. contains guide rollers arranged at the corners of a polygon; and a cooled roller pref. guides the strip in a loop above the evaporator, which is pref. inside an inner chamber in the vacuum chambers. Extremely thin strip can be coated by this method.</p>
申请公布号 DE2747061(A1) 申请公布日期 1979.04.26
申请号 DE19772747061 申请日期 1977.10.20
申请人 LEYBOLD-HERAEUS GMBH 发明人 WALTER,HEINZ
分类号 C23C14/56;(IPC1-7):23C13/10;23C15/00 主分类号 C23C14/56
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