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发明名称
摘要
申请公布号	JPS549590(B2)	申请公布日期	1979.04.25
申请号	JP19720120528	申请日期	1972.11.30
申请人		发明人
分类号	C30B19/12;H01L21/208;H01L33/30;H01L33/34	主分类号	C30B19/12
代理机构		代理人
主权项
地址

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