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发明名称
METHOD OF DETERMINING IMPURITY DIFFUSION COEFICIENT
摘要
申请公布号
SU658627(A1)
申请公布日期
1979.04.25
申请号
SU19762423004
申请日期
1976.11.25
申请人
INST POLLUPROVODNIKOV AN UK SSR
发明人
MAKSIMENKO YURIJ N,SU;SVECHNIKOV SERGEJ V,SU;STEPANCHUK VLADIMIR P,SU
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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