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发明名称
摘要
申请公布号
JPS5457953(U)
申请公布日期
1979.04.21
申请号
JP19770130853U
申请日期
1977.09.29
申请人
发明人
分类号
H01L21/673;H01L21/22;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/673
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