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经营范围
发明名称
ETCHING DEVICE
摘要
申请公布号
JPS5450442(A)
申请公布日期
1979.04.20
申请号
JP19770117514
申请日期
1977.09.30
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
SHIROMIZU SHIYUNJI;SATOU SHIYOUZOU
分类号
C23F1/08
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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