| 摘要 |
PURPOSE:To improve the manufacture yield and work precision by working a part between both arms by photo-etching. CONSTITUTION:A metal film is vapor-deposited on a crystal substrate cut in an appropriate direction, and a vapor-deposition unneeded part is coated with photo resist, which is lifted. Next, the surface is electrolytically plated with gold to make the layer thick, and it is etchec by a fluoric-acid solution of 49%, thereby removing the part covered with no metal film. Next, the metal is etched by acid and cleaned to obtain a crystal substrate in a prescribed shape. On this surface, an electrode is metallized, and separation into respective element pieces, thereby obtaining tuning- fork type crystal vibrators. |
