发明名称 |
Method and apparatus for manufacturing high-purity silicon rods |
摘要 |
A method of manufacturing high-purity silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod-shaped high-purity silicon carrier members which have been red-heated by directly passing an electric current therethrough thereby depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis or thermal decomposition on said red-heated carrier members while insulating the radiant heat between said red-heated carrier members along the overall length thereof.
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申请公布号 |
US4150168(A) |
申请公布日期 |
1979.04.17 |
申请号 |
US19780882817 |
申请日期 |
1978.03.02 |
申请人 |
KABUSHIKI KAISHA KOMATSU SEISAKUSHO |
发明人 |
YATSURUGI, YOSHIFUMI;YUSA, ATSUSHI;TAKAHASHI, NAGAO |
分类号 |
C01B33/02;C01B33/029;C01B33/035;C23C16/22;C23C16/24;C23C16/46;(IPC1-7):B05D5/12 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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