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发明名称
摘要
申请公布号
JPS5455274(U)
申请公布日期
1979.04.17
申请号
JP19770129729U
申请日期
1977.09.26
申请人
发明人
分类号
H01L23/32;G01R31/26;H01L21/66;H01L23/00;(IPC1-7):H01L21/66
主分类号
H01L23/32
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