| 摘要 |
PURPOSE:To prevent sticking of deposited membrane to the tapered part of metallizing crucible of electron-beam-heating type and contamination of the deposited membrane on the object surface, by installing an insulating vessel which covers whole inside surface of tapered part and concave part which contains metallizing material. CONSTITUTION:In the center of the body 1 of a metallizing crucible is a concave part for a vessl, the concave part consisting of a concave 2 of a truncated cone shape and a tapered part 3, which is located on the concave 2, for specifying evaporating direction. In the concave part for a vessel is set an insulating vessel 4 which covers whole of the inside wall surface, and material 5 to be evaporated, e.g., Al etc., is put into the concave 6 of the insulating vessel 4. The insulating vessel 4 is made of electroconductive ceramics, SiC, or graphite etc., so that heat is difficult to be conducted to the crucible body 1 when the material is heated. This method causes to make is unnecessary to remove deposited material on the crucible, preventing contamination of the deposited membrane arising from the deposited material. |
