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发明名称
摘要
申请公布号
JPS548070(B2)
申请公布日期
1979.04.12
申请号
JP19750134752
申请日期
1975.11.11
申请人
发明人
分类号
G03B27/32;G03F7/20;H01L21/027;H01L21/30
主分类号
G03B27/32
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