发明名称 METHOD FOR MANUFACTURE OF A SEMICONDUCTOR DEVICE
摘要 <p>A semiconductor device and method of making the same is disclosed having a surface passivation film of a polycrystalline silicon layer containing 2 to 45 atomic percent of oxygen atoms. The polycrystalline silicon layer is locally electrically insulated by oxidizing throughout the thickness of the layer. The local oxidizing treatment causes the polycrystalline or silicon layer to pattern.</p>
申请公布号 CA1052476(A) 申请公布日期 1979.04.10
申请号 CA19760247703 申请日期 1976.03.11
申请人 SONY CORPORATION 发明人 AOKI, TERUAKI;ABE, MOTOAKI
分类号 H01L29/78;H01L21/00;H01L21/316;H01L21/331;H01L21/336;H01L29/00;H01L29/73;(IPC1-7):01L21/322;01L21/76 主分类号 H01L29/78
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