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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5445583(A)
申请公布日期
1979.04.10
申请号
JP19770112814
申请日期
1977.09.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TSUJI KAZUHIKO;OOSONE TAKASHI
分类号
H01L21/768;H01L21/306
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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