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发明名称
MANUFACTURE OF TRANSISTOR
摘要
申请公布号
JPS5444874(A)
申请公布日期
1979.04.09
申请号
JP19770110584
申请日期
1977.09.16
申请人
HITACHI LTD
发明人
KATOU HIDEAKI;TSUKIKAWA TSUNAO
分类号
G01R31/26;H01L21/331;H01L21/66;H01L29/72;H01L29/73
主分类号
G01R31/26
代理机构
代理人
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