| 发明名称 |
CONVEYING DEVICE BETWEEN ATMOSPHERIC PRESSURE AND VACUUM |
| 摘要 |
PURPOSE:To manufacture the conveying device between atmospheric pressure and vacuum of high performance by providing an auxiliary vacuum chamber of a small capacity which the object to be moved and a chuck only go in and out. |
| 申请公布号 |
JPS5441075(A) |
申请公布日期 |
1979.03.31 |
| 申请号 |
JP19770107683 |
申请日期 |
1977.09.07 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
KANAI MUNENORI;ASAKAWA MAKOTO |
| 分类号 |
H01L21/677;C23C14/56;H01L21/302;H01L21/3065;H01L21/31 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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