MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE SUBSTRATE,申请号JP19770107004-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE SUBSTRATE
摘要
申请公布号	JPS5440077(A)	申请公布日期	1979.03.28
申请号	JP19770107004	申请日期	1977.09.05
申请人	NIPPON ELECTRIC CO	发明人	HARA TOSHIO
分类号	H01L21/66;H01L21/31	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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