| 发明名称 |
CHROME PLATE |
| 摘要 |
PURPOSE:To manufacture a high-precision mask by setting the density of O in CrOx to 0 to 0.01 or 0.1 to 2.5 at an atom-number ratio of O to Cr and by providing a thin film of no oxide to the interface between a Cr film surface and transparent substrate at need. |
| 申请公布号 |
JPS5437579(A) |
申请公布日期 |
1979.03.20 |
| 申请号 |
JP19770104475 |
申请日期 |
1977.08.30 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
NISHIOKA KIYUUSAKU;YAMAZAKI TERUHIKO;UNO JIYUN;HOSHIKA HARUYUKI;KANEDAKI YUKIMICHI;YAMADA MITSURU |
| 分类号 |
H01L21/302;G03F1/00;G03F1/58;H01L21/027;H01L21/3065 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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