Method for enhancing the crystallization rate of high purity amorphous Si{hd 3{b N{HD 4 {B powder, powders produced thereby and products therefrom

摘要

High purity, fine Si3N4 powder produced by the vapor phase reaction of SiCl4 with NH3 is amorphous. The crystallization rate of the amorphous powder is enhanced by heating the powder while in intimate contact with a titanium containing material, for example, TiN codeposited with the Si3N4 by the simultaneous reaction of TiCl4 with NH3.