摘要 |
A multiple ion beam type double focusing mass spectrometer designed to control ion beams from a plurality of ion sources so as to form a single beam. The single ion beam is introduced into an electric field while the accelerating voltages or electric field intensity is varied stepwise so that by means of the energy dispersion effect of said electric field, the respective ion beams accelerated at different accelerating voltages are repeatedly and sequentially introduced into a magnetic field. At the output side of the magnetic detector, an ion detector detects said repeatedly and sequentially introduced ion beams and converts them into time shared signals. |