| 发明名称 |
CHEMICAL EVAPORATION METHOD AND APPARATUS FOR SAME |
| 摘要 |
PURPOSE:To accomplish a continuous chemical evaporation of a uniform, nonemulsive, transparent film with a greater area through a high speed incidence of a film-forming reactive gas to the substrate at a specified angle together with a high speed reflection thereof on the substrate.
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| 申请公布号 |
JPS5437077(A) |
申请公布日期 |
1979.03.19 |
| 申请号 |
JP19770093291 |
申请日期 |
1977.08.02 |
| 申请人 |
KOGYO GIJUTSUIN;CHUGOKU MARINE PAINTS |
发明人 |
TABATA OSAMU;WASEDA MIZUAKI |
| 分类号 |
C23C16/44;C03C17/245;C23C16/455 |
主分类号 |
C23C16/44 |
| 代理机构 |
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代理人 |
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| 地址 |
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