| 发明名称 |
CHARGED PARTICLE ENERGY ANALYZING APPARATUS |
| 摘要 |
PURPOSE:To make possible obtaining even the information on the undulating condition of surface by providing a charged particle flux deflecting part between deflecting electrodes and a slit thereby deflecting a protion of the charge particle flux being condensed so as not to allow the same to enter the slit.
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| 申请公布号 |
JPS5436990(A) |
申请公布日期 |
1979.03.19 |
| 申请号 |
JP19770102706 |
申请日期 |
1977.08.29 |
| 申请人 |
HITACHI LTD |
发明人 |
ISHIKAWA KIYOSHI;GOTOU SUMITAKA;ITOU MICHIYASU |
| 分类号 |
G01N23/227;G01N23/225;G01Q30/02;G01Q90/00;G01T1/36;G21K1/087;H01J37/256;H01J49/44;H01J49/48 |
主分类号 |
G01N23/227 |
| 代理机构 |
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代理人 |
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