ETCHING PROCESS METHOD FOR SEMICONDUCTOR ELEMENT,申请号JP19770098006-传众专利搜索

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发明名称	ETCHING PROCESS METHOD FOR SEMICONDUCTOR ELEMENT
摘要
申请公布号	JPS5432070(A)	申请公布日期	1979.03.09
申请号	JP19770098006	申请日期	1977.08.15
申请人	NIPPON ELECTRIC CO	发明人	USUNAGA YUKIYASU;MIYAZAKI MOTOFUMI
分类号	H01L21/3063;H01L21/302	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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