发明名称 PRODUCTION OF EMULSION PHOTO MASKS
摘要 PURPOSE:To readily produce postive masks of high resolution permitting high integration by baking the dry plate, which has undergone developing and exposure, under specific conditions then bleaching the same thereby readily inverting the balck and w white of the emulsion photo mask having undergone normal treatment.
申请公布号 JPS5431736(A) 申请公布日期 1979.03.08
申请号 JP19770097964 申请日期 1977.08.16
申请人 FUJITSU LTD 发明人 MORISHIGE AKIRA
分类号 G03C5/00;G03F1/00;G03F1/56;H01L21/027 主分类号 G03C5/00
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