DRUCKREGLER ZUR REGELUNG DES DRUCKES VON MINDESTENS EINEM GAS IN ABHAENGIGKEIT DES DRUCKES EINES ANDEREN GASES

摘要

A pressure control unit comprises a central reference chamber in which the gas pressure is adjustable and one or more control chambers, each of which is separated from the reference chamber by a membrane system which consists of two interconnected membranes having a predetermined ratio of their surface areas. Each membrane system is connected to a valve for controlling the flow of a gas to the respective control chamber whereby the pressure therein varies in proportion to the reference pressure.