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发明名称
摘要
申请公布号
JPS544600(B2)
申请公布日期
1979.03.08
申请号
JP19730022868
申请日期
1973.02.26
申请人
发明人
分类号
H01L33/30;H01S5/00
主分类号
H01L33/30
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代理人
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