发明名称 |
DETECTION SYSTEM FOR POSITION |
摘要 |
PURPOSE:To simplify the detection of a chip position by enabling an optical system to scan compressively a pattern in a fixed direction in a detection area provided onto a semiconductor wafer and by threshold-level-processing electric signals, which correspond to the only obtained bump string or a scribe line, or by matching-processing with a reference pattern. |
申请公布号 |
JPS5429977(A) |
申请公布日期 |
1979.03.06 |
申请号 |
JP19770095062 |
申请日期 |
1977.08.10 |
申请人 |
HITACHI LTD |
发明人 |
NAKAGAWA YASUO;HAMADA TOSHIMITSU;HONGOU MIKIO |
分类号 |
H01L21/30;G01B11/00;G03B27/00;G03B27/02;G03F7/20;H01L21/027;H01L21/68 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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