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发明名称	ISOLATION METHOD FOR SEMICONDUCTOR REGION
摘要
申请公布号	JPS5499583(A)	申请公布日期	1979.08.06
申请号	JP19790002183	申请日期	1979.01.16
申请人	HITACHI LTD	发明人	OGIUE KATSUMI
分类号	H01L29/78;H01L21/76	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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