| 发明名称 |
MANUFACTURE OF MICROWAVE CIRCUIT PATTERN |
| 摘要 |
<p>PURPOSE:To obtain a high-accuracy and high-contrast mask which coincides completely onto the uneven surface substrate, by forming the transcript mask substrate of the solid uneven surface substrate via the resin injected and then removing the metal layer by the parallel photo beam lithography.</p> |
| 申请公布号 |
JPS5427367(A) |
申请公布日期 |
1979.03.01 |
| 申请号 |
JP19770090948 |
申请日期 |
1977.08.03 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
IWAZAWA AKIRA;TABEI HISAO;ONOSE KATSUHIDE;MATSUYAMA KENTAROU |
| 分类号 |
H05K3/00;G03F1/00;G03F1/68;G03F1/80;H01L21/027;H01L21/302 |
主分类号 |
H05K3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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