发明名称 ELECTRON BEAM EVAPORATION APPARATUS
摘要 PURPOSE:To accomplish withdrawal of evaporated metals or the like accumulated on hopper section by means of a protective member or the like mounted to the hopper section at the upper end of a hearth in such a manner as to closely contact therewith while the inclination is equal thereto.
申请公布号 JPS5425282(A) 申请公布日期 1979.02.26
申请号 JP19770089772 申请日期 1977.07.28
申请人 DENKI KAGAKU KOGYO KK 发明人 NAKASHIMA MASAHIKO;MIKOGAMI AKIO;HASEGAWA MASASHI
分类号 C23C14/30 主分类号 C23C14/30
代理机构 代理人
主权项
地址