发明名称 MANUFACTURE FOR SEMICONDUCTOR ELEMENT
摘要 <p>PURPOSE:To make easy manufacturing, by performing grooveing and cutting work with accurate mutual distance and at the same time, in manufacturing the mesa constructin element at the center of the semiconductor element chip accurately.</p>
申请公布号 JPS5424572(A) 申请公布日期 1979.02.23
申请号 JP19770089622 申请日期 1977.07.25
申请人 NIPPON ELECTRIC CO 发明人 KURIYAMA YOUICHI
分类号 H01L21/301;H01L21/302 主分类号 H01L21/301
代理机构 代理人
主权项
地址