| 摘要 |
<p>PURPOSE:To enhance flow rate detection response by laminating a resistor film for a heater and the second temp. dependence resistor film through an insulating layer. CONSTITUTION:A resistor Rh as a resistor film for a heater, a resistor Rm as the second temp. dependence resistor film and a resistor Rf as the first temp. dependence type resistor film are provided on a glass substrate 1 and both resistors Rh, Rm are laminated through a membrane insulating layer 2. By this constitution, the distance between both resistors Rm, Rh becomes shorter down to the thickness of the insulating layer 2 and the heat transmitting time between the resistors Rm, Rh is shortened and flow rate detection response is enhanced.</p> |
