发明名称 |
AUTOMATIC FOCUSING DEVICE |
摘要 |
PURPOSE:To simplify the construction and improve the operating efficiency by guiding a laser beam to a sample surface at a preset angle of incidence and by receiving the reflected beam so that the vertical dislocation of the sample from a preset postiion may be detected. |
申请公布号 |
JPS5422845(A) |
申请公布日期 |
1979.02.21 |
申请号 |
JP19770087271 |
申请日期 |
1977.07.22 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MINAMI MASAKATA;WATANABE TOMOHIDE |
分类号 |
G02B7/32 |
主分类号 |
G02B7/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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