发明名称 AUTOMATIC FOCUSING DEVICE
摘要 PURPOSE:To simplify the construction and improve the operating efficiency by guiding a laser beam to a sample surface at a preset angle of incidence and by receiving the reflected beam so that the vertical dislocation of the sample from a preset postiion may be detected.
申请公布号 JPS5422845(A) 申请公布日期 1979.02.21
申请号 JP19770087271 申请日期 1977.07.22
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 MINAMI MASAKATA;WATANABE TOMOHIDE
分类号 G02B7/32 主分类号 G02B7/32
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