EVALUATING METHOD FOR SI CRYSTAL,申请号JP19770087250-传众专利搜索

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发明名称	EVALUATING METHOD FOR SI CRYSTAL
摘要
申请公布号	JPS5422760(A)	申请公布日期	1979.02.20
申请号	JP19770087250	申请日期	1977.07.22
申请人	FUJITSU LTD	发明人	SHIRAI KAZUNARI;YABU TAKASHI
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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