发明名称 Laser autoalignment system using distortion compensated reflection grating
摘要 A method and system for automatically aligning a high power laser utilizing a diffraction ruled reflection grating to sample the laser beam. A tiltable beam alignment mirror directs a laser beam in a path incident to the reflection grating which separates the incident beam into a reflected beam and first and second order diffraction beams. A tiltable distortion compensation mirror is positioned in the path of the two diffraction beams. Two auxiliary fixed mirrors are positioned such that the diffraction beams will reflect a predetermined number of times off the distortion compensation mirror prior to reflecting toward respective null position detectors. Error signals from these detectors are translated, in accordance with certain optical and mathematical relationships, into angular adjustments to the two tiltable mirrors, thereby compensating for the thermal distortion of the reflection grating and aligning the output laser beam.
申请公布号 US4140398(A) 申请公布日期 1979.02.20
申请号 US19770834098 申请日期 1977.09.16
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY 发明人 HODDER, ROBERT E.
分类号 G01B11/27;(IPC1-7):G01B11/26 主分类号 G01B11/27
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