| 发明名称 |
Dissolution of metals with a selenium catalyzed H{HD 2{B O{HD 2{B -H{HD 2{B SO{HD 4{B {0 etchant containing t-butyl hydroperoxide |
| 摘要 |
Clean etchings at high rates are obtained using a solution containing sulfuric acid, hydrogen peroxide, a catalytic amount of a selenium compound of a +4 oxidation state and t-butyl hydroperoxide.
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| 申请公布号 |
US4140646(A) |
申请公布日期 |
1979.02.20 |
| 申请号 |
US19770849572 |
申请日期 |
1977.11.08 |
| 申请人 |
DART INDUSTRIES INC. |
发明人 |
KENT, RONALD A.;ALLAN, JOHN L. H.;READIO, PHILIP D. |
| 分类号 |
C23F1/16;(IPC1-7):C09K13/06 |
主分类号 |
C23F1/16 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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