发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the field concentration and thus to avoid the deterioration of the memory holding property for the double-gate type nonvolatile memory by securing such structure that causes no overhang at the periphery of the floating gate.
申请公布号 JPS5422782(A) 申请公布日期 1979.02.20
申请号 JP19770087282 申请日期 1977.07.22
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 TAKESHITA YUUJI
分类号 H01L23/522;H01L21/768;H01L21/8247;H01L29/417;H01L29/788;H01L29/792 主分类号 H01L23/522
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