发明名称 PHOTO MASK
摘要 PURPOSE:To make easy the introduction and discharge of air when adhering the mask on the photo sensitive material, by placing the grooves of the separation section with the frame of each grid of the thin film metallic mask formed on a glass substrate through positioning them at the diagonal line of the frame.
申请公布号 JPS5421270(A) 申请公布日期 1979.02.17
申请号 JP19770086819 申请日期 1977.07.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 ENOMOTO TATSUYA;ISHIKAWA YUUICHI
分类号 G03F1/60;H01L21/027;H01L21/302 主分类号 G03F1/60
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