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发明名称
FORMING METHOD OF SEMICONDUCTOR OXIDE FILM
摘要
申请公布号
JPS5421265(A)
申请公布日期
1979.02.17
申请号
JP19770086805
申请日期
1977.07.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUBOUCHI NATSUO;MIYAKE KUNIAKI;MIYOSHI HIROKAZU
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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