SIDE ETCHING METHOD OF SEMICONDUCTOR PELLETS,申请号JP19770084254-传众专利搜索

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发明名称	SIDE ETCHING METHOD OF SEMICONDUCTOR PELLETS
摘要
申请公布号	JPS5419665(A)	申请公布日期	1979.02.14
申请号	JP19770084254	申请日期	1977.07.15
申请人	HITACHI LTD	发明人	TAKAHASHI YUKIO
分类号	H01L21/306;H01L21/302	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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