发明名称 PRODUCTION OF SEMICONDUCTOR MEMORY
摘要 PURPOSE:To produce a non-volatile memory device of high performances by forming p<+> layers in self-alignment to source and drain to a p type substrate, and forming the source and drain also in self-alignment to both of external and floating gates.
申请公布号 JPS5419372(A) 申请公布日期 1979.02.14
申请号 JP19770084833 申请日期 1977.07.14
申请人 NIPPON ELECTRIC CO 发明人 KIKUCHI MASANORI
分类号 H01L29/417;H01L21/8247;H01L29/788;H01L29/792 主分类号 H01L29/417
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