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发明名称
摘要
申请公布号
JPS542822(B2)
申请公布日期
1979.02.14
申请号
JP19740021077
申请日期
1974.02.21
申请人
发明人
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
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代理人
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