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发明名称
摘要
申请公布号
JPS5422470(U)
申请公布日期
1979.02.14
申请号
JP19770094335U
申请日期
1977.07.15
申请人
发明人
分类号
G01R31/26;G01R1/06;G01R1/073;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
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