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发明名称
PRODUCTION OF SEMICONDUCTOR ELEMENTS
摘要
申请公布号
JPS5419666(A)
申请公布日期
1979.02.14
申请号
JP19770084268
申请日期
1977.07.15
申请人
HITACHI LTD
发明人
OKAMURA SHINAYA
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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