| 摘要 |
Piezoelectric microresonators with suspension arms, oscillating according to a vibration resulting from the superposition of a principal extensional mode of oscillation, of a first shear coupled mode of oscillation and of a second extensional coupled mode of oscillation. The suspension arms are attached to the active part of the resonator in a place which is the intersection of a nodal plane of the vibration resulting of the superposition of the principal mode and of the first coupled mode of oscillation. The other end of the arms is fixed on a stiff support in a location which coincide with a node of their vibration.
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