发明名称 RF POWER TRANSMISSION LINE FOR INDUCTION HEATED VAPOR SOURCE
摘要 <p>Transmission line for RF power utilizing generally flat supply and return lines each comprising a plurality of flexible, insulated conductors connected together at their ends. The two lines are enclosed in a flexible sheath which holds the lines in close proximity to each other, and fields produced by the lines tend to cancel each other. The transmission line is particularly suitable for use in delivering power from a radio frequency power supply to the work coil of an induction heated vapour source.</p>
申请公布号 CA1048613(A) 申请公布日期 1979.02.13
申请号 CA19750240290 申请日期 1975.11.24
申请人 APPLIED MATERIALS, INC. 发明人 SCHATZ, DOUGLAS S.
分类号 (IPC1-7):05B5/08 主分类号 (IPC1-7):05B5/08
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