发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To enhance the working efficiency of the junction as well as the quality by eliminating flaws caused near the substrate main surface at the mechanical cutting/isolating time and dissolving the phenomenon in which the sticking material swells up toward the substrate main surface.</p>
申请公布号 JPS5418271(A) 申请公布日期 1979.02.10
申请号 JP19770083290 申请日期 1977.07.11
申请人 NIPPON ELECTRIC CO 发明人 NAKAMURA MASARU
分类号 H01L21/301;H01L21/00;H01L21/302;H01L21/78 主分类号 H01L21/301
代理机构 代理人
主权项
地址