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发明名称
TRANSFER PIPING
摘要
申请公布号
JPS6229186(A)
申请公布日期
1987.02.07
申请号
JP19850167577
申请日期
1985.07.31
申请人
HITACHI LTD;HITACHI SERVICE ENG CO LTD
发明人
OKUMURA YUJI;IMURA HIROYA;TAKAHASHI TAKESHI
分类号
H01L39/04
主分类号
H01L39/04
代理机构
代理人
主权项
地址
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