| 发明名称 |
SEMICONDUCTOR VAPOR GROWTH DEVICE |
| 摘要 |
PURPOSE:To ensure a uniform air current velocity by providing the short tube of the radial head-cut conical shape at the air current lead-in side of the reaction tube in the necessary shape and units and concentrically with the reaction tube. |
| 申请公布号 |
JPS5418272(A) |
申请公布日期 |
1979.02.10 |
| 申请号 |
JP19770082554 |
申请日期 |
1977.07.12 |
| 申请人 |
FUJITSU LTD |
发明人 |
KITAHARA KUNINORI;IKEDA TOSHIYUKI |
| 分类号 |
C30B25/14;C23C16/44;C23C16/455;H01L21/205;H01L21/22 |
主分类号 |
C30B25/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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