EVAPORATING SOURCE HOUSING DEVICE FOR BATCH-OPERATED VACUUM DEPOSITION DEVICE,申请号JP19850167510-传众专利搜索

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发明名称	EVAPORATING SOURCE HOUSING DEVICE FOR BATCH-OPERATED VACUUM DEPOSITION DEVICE
摘要
申请公布号	JPS6230874(A)	申请公布日期	1987.02.09
申请号	JP19850167510	申请日期	1985.07.31
申请人	ULVAC CORP	发明人	KATO TAKEO;SUNAGA YOSHIO
分类号	C23C14/24;F16B35/00	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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