| 摘要 |
<p>PURPOSE:To make it possible to manufacture directly a needle-shaped cathode through simple processing, and also to control freely the radius of curvature at the tip of the cathode by making an electron radiation part of a polymer of carbon. CONSTITUTION:In a vacuum atomsphere where hydrocarbon resides, carbon film 1 is irradiated with electron beam 2. Electron beam 2 of 10<-9>A is focused by a current to a diameter of 20Angstrom first and then caused to strike carbon film 1 for several to tens seconds, so that a conic body of approximate lmum to 5mum in height 100Angstrom in tip-part curvature radius will be grown as shown by 3a to 3e according to time. Further, irradiation with a beam of 500Angstrom in spot diameter for tens to hundreds seconds allows a conic body of 1000Angstrom in tip-part curvature radius to grow as shown 4a to 4e. In this way, variation in spot diameter makes it easy to obtain a polymer of 100Angstrom to 1000Angstrom in radius of curvature, and variations in time and current make it easy to obtain one of 1 to 10mum in height. This can be manufactured easily by making use of an electron-beam device such as an electron microscope and its quality can be checked immediately by observing a scanning electron image.</p> |
